Silane CAS 7803-62-5

Silane is a compound of silicon and hydrogen, and is a general term for a range of compounds, including silane (SiH4), ethylsilane (Si2H6), and some of the more advanced silanes. Silane is currently the most widely used. Silicane is commonly referred to as silane for short.

Silane, as a gas source providing silicon components, can be used to manufacture high purity polysilicon, monocrystalline silicon, microcrystalline silicon, amorphous silicon, silicon nitride, silicon oxide, heterogeneous silicon, and various metal silicides. Because of its high purity and fine control, it has become an important special gas that cannot be replaced by many other silicon sources. Silane is widely used in the microelectronics and optoelectronics industry for the manufacture of solar cells, flat panel displays, glass and steel coatings, and is the world's only intermediate product for the mass production of granular high purity silicon. The high-tech applications of silane are still emerging, including for the manufacture of advanced ceramics, composite materials, functional materials, biological materials, high-energy materials, etc., becoming the basis for many new technologies, new materials, and new devices. Silane is also known for its characteristic spontaneous combustion and explosive properties. Silane has a very wide spontaneous ignition range and a very strong combustion energy, which determines that it is a highly dangerous gas.

Production process: three main: silicon magnesium alloy process (Komatsu process); Chlorosilane disproportionation process (UCC); Metal hydride process (MEMC method) three. The company's silane production process is chlorosilane disproportionation process (UCC), which is consistent with the REC process.

Application: vapor deposition, epitaxial growth, coating, diffusion and other processes.

Packing method:

1. Y bottle (470L about 125KG, room temperature pressure about 130KG), for general use.

2. Tube bundle car (also known as torpedo car, 20 feet 8 tubes about 2.8 tons, pressure about 110KG), used for mass transportation and use.

3. Another 12KG small package gas cylinder.

Save:

1. Store in a well-ventilated, safe and weatherproof place. Cylinders should be placed upright. And keep the seal of the protective valve cover and output valve intact.

2. Storage areas should be away from frequent access points and emergency exits. There should be no fire source in the storage area, and all electrical appliances in the storage area must have explosion-proof facilities. The flammable storage area should be at least 20ft away from the oxygen and oxide storage area.

3. Or place a non-flammable material at least 5 feet high in the middle as a barrier to ensure fire resistance for half an hour. There should be "No smoking and no open flame" signs in the storage and use areas.

4. Storage temperature shall not exceed 125 ° F (52 ° C). Keep empty bottles separate from full bottles. Avoid excessive storage and long storage time.

5. Use FIFO system. Installation of leak detectors and alarm devices in storage areas should be considered.

The quality standards for silane gases are for reference only

硅烷 （SiH4)

Precautions in the use of silane gas

Silane gas precautions: Workplaces that use silane should be ventilated to keep the indoor air dry. The silane device should be strictly sealed to avoid contact with air and water, for this reason, the gas device should be vacuumed after replacing the air inside with inert gas before use, so that the replacement and vacuuming are repeated, and the air and water in the system must be completely removed. After the device is used, silane in the cleaning system should also be replaced with an inert gas. A helium leak detector can be used to detect leaks. When a small amount of silane leaks, it can also be known from the folding of silicon oxide powder. Cylinders should be stored in a cool, dry and well-ventilated place, away from heat sources and oxidizing agents such as chlorine and bromine. The workplace should be equipped with adequate protective equipment and emergency supplies. Silanes are non-corrosive and can be used in carbon steel, stainless steel, copper, brass, Monel, and corrosion-resistant nickel-based alloys. It can also be used as polytetrafluoroethylene, polytrifluoroethylene chloride polymer, nylon, trifluorovinyl chloride resin, polyethylene, polyester, quartz glass. Do not use lead, rubber, fat, lubricating oil, glass. All combustible organic polymer materials should be avoided. When there's a large leak of silane. There was a fire coming next, so you couldn't put it out with a fire extinguisher. But you can control the fire so that it doesn't spread around. The radiant heat is not too high during combustion, so the valve should be closed as much as possible to stop the outflow of gas. The flame can be extinguished by white stone powder or graphite powder. The waste gas can be absorbed with water or alkali, or captured by a special filter after burning into SiO2 in a special burner. Store in a cool, ventilated warehouse. Keep away from fire and heat. The temperature of the reservoir should not exceed 30℃. It should be stored separately from easy (can) combustibles and oxidants, and should not be mixed. Storage area should be equipped with leakage emergency treatment equipment. Closed operation, local exhaust. Operators must be specially trained and strictly abide by the operating procedures. It is recommended that operators wear a filter gas mask (half mask). Keep away from flammable and combustible materials. Prevents gas leakage into the workplace air. Avoid contact with oxidants. Light loading and unloading during handling to prevent cylinder and accessories damage. Equipped with leak emergency treatment equipment.